China's first domestically produced commercial electron beam lithography machine was born

According to official Hangzhou media reports, China's first domestically produced commercial electron beam lithography machine, the "Xizhi," has been produced in Hangzhou. This machine is expected to overcome international export control constraints and boasts precision comparable to mainstream international equipment, marking the beginning of a Chinese tool for quantum chip development.

According to reports, "Xizhi" is named after the calligrapher Wang Xizhi. This machine specializes in the core aspects of quantum chip and new semiconductor research and development. It uses a high-energy electron beam to "handwrite" circuits on a silicon substrate with a precision of 0.6nm and a line width of 8nm. It allows for flexible design modifications without the need for masks, much like painting with a nanoscale brush on a wafer, making it ideal for repeated debugging during the early stages of chip development.